Invention Grant
- Patent Title: Surface inspection method and surface inspection apparatus
- Patent Title (中): 表面检查方法和表面检查装置
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Application No.: US12814518Application Date: 2010-06-14
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Publication No.: US08248594B2Publication Date: 2012-08-21
- Inventor: Shigeru Matsui
- Applicant: Shigeru Matsui
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2006-237970 20060901
- Main IPC: G01N22/00
- IPC: G01N22/00
Abstract:
A surface inspection method and a surface inspection apparatus in which a plurality of photodetectors are arranged in a plurality of directions so that light scattered, diffracted or reflected on a surface of an object to be inspected or in the vicinity of the surface is detected and a plurality of signals obtained by this are subjected to weighted addition processing or weighted averaging processing by linear combination.
Public/Granted literature
- US20100271625A1 Surface Inspection Method and Surface Inspection Apparatus Public/Granted day:2010-10-28
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