发明授权
US08253075B2 Heat treatment apparatus, heater, and method for manufacturing the heater
有权
热处理装置,加热器及加热器的制造方法
- 专利标题: Heat treatment apparatus, heater, and method for manufacturing the heater
- 专利标题(中): 热处理装置,加热器及加热器的制造方法
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申请号: US12223162申请日: 2007-02-07
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公开(公告)号: US08253075B2公开(公告)日: 2012-08-28
- 发明人: Makoto Kobayashi , Kenichi Yamaga , Takanori Saito
- 申请人: Makoto Kobayashi , Kenichi Yamaga , Takanori Saito
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2006-042707 20060220
- 国际申请: PCT/JP2007/052144 WO 20070207
- 国际公布: WO2007/097199 WO 20070830
- 主分类号: F27B5/08
- IPC分类号: F27B5/08 ; F27B5/16 ; F27D1/12
摘要:
A heat treatment apparatus with a process chamber, a tubular heater, a heat exhaust system and a cooling section. The heater surrounds an outer circumference of the process chamber. The heat exhaust system exhausts an atmosphere in a space between the heater and the process chamber. The cooling section blows a cooling fluid into the space to cool the atmosphere. The heater includes a tubular heat insulator, a heat generating resistor on an inner circumference of the heat insulator, and an outer shell provided on an outer circumference of the heat insulator. The cooling section includes at least one annular flow path between the heat insulator and the outer shell, and an outlet in the heat insulator. The outlet blows cooling fluid toward a vertical central axis of the heat insulator, or in a direction oblique to the direction toward vertical central axis of the heat insulator.