Invention Grant
US08253183B2 Charge trapping nonvolatile memory devices with a high-K blocking insulation layer
有权
电荷捕获具有高K阻挡绝缘层的非易失性存储器件
- Patent Title: Charge trapping nonvolatile memory devices with a high-K blocking insulation layer
- Patent Title (中): 电荷捕获具有高K阻挡绝缘层的非易失性存储器件
-
Application No.: US12861366Application Date: 2010-08-23
-
Publication No.: US08253183B2Publication Date: 2012-08-28
- Inventor: Chang-hyun Lee
- Applicant: Chang-hyun Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR2001-37421 20010628; KR2002-05622 20020131; KR2003-26776 20030428
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
Provided is a charge trapping nonvolatile memory device. The charge trapping nonvolatile memory device includes: an active pattern and a gate electrode, spaced apart from each other; a charge storage layer between the active pattern and the gate electrode; a tunnel insulation layer between the active pattern and the charge storage layer; and a blocking insulation layer disposed between the charge storage layer and the gate electrode and including a high-k layer with a higher dielectric constant than the tunnel insulation layer and a barrier insulation layer with a higher band gap than the high-k layer. A physical thickness of the high-k layer is less than or identical to that of the barrier insulation layer.
Public/Granted literature
- US20100314679A1 CHARGE TRAPPING NONVOLATILE MEMORY DEVICES WITH A HIGH-K BLOCKING INSULATION LAYER Public/Granted day:2010-12-16
Information query
IPC分类: