发明授权
- 专利标题: Electronic component and method for manufacturing electronic component
- 专利标题(中): 电子元器件及其制造方法
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申请号: US12507284申请日: 2009-07-22
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公开(公告)号: US08253301B2公开(公告)日: 2012-08-28
- 发明人: Taro Nishino , Takashi Iwamoto
- 申请人: Taro Nishino , Takashi Iwamoto
- 申请人地址: JP Kyoto
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2008-218053 20080827
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
A method for manufacturing an electronic component includes a first step of preparing a piezoelectric body with a flat surface, a second step of implanting ions into the piezoelectric body such that an ion-implanted layer is formed in the piezoelectric body, a third step of forming sacrificial layers on the flat surface of the piezoelectric body, a fourth step of forming an insulating body over the flat surface of the piezoelectric body and the sacrificial layers to form a piezoelectric structure, a fifth step of dividing the piezoelectric body at the ion-implanted layer to form a piezoelectric laminar structure in which a piezoelectric film separated from the piezoelectric body is bonded to the insulating body, a sixth step of forming electrodes on portions of a division surface of the piezoelectric film, and a seventh step of removing the sacrificial layers from the piezoelectric laminar structure.
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