Invention Grant
- Patent Title: Nonvolatile semiconductor memory apparatus and manufacturing method thereof
- Patent Title (中): 非易失性半导体存储装置及其制造方法
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Application No.: US12515379Application Date: 2007-11-13
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Publication No.: US08258493B2Publication Date: 2012-09-04
- Inventor: Takumi Mikawa , Takeshi Takagi
- Applicant: Takumi Mikawa , Takeshi Takagi
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-312590 20061120
- International Application: PCT/JP2007/071962 WO 20071113
- International Announcement: WO2008/062688 WO 20080529
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
A nonvolatile semiconductor memory apparatus (10) of the present invention comprises a substrate (10), lower-layer electrode wires (15) provided on the substrate (11), an interlayer insulating layer (16) which is disposed on the substrate (11) including the lower-layer electrode wires (15) and is provided with contact holes at locations respectively opposite to the lower-layer electrode wires (15), resistance variable layers (18) which are respectively connected to the lower-layer electrode wires (15); and non-ohmic devices (20) which are respectively provided on the resistance variable layers (18) such that the non-ohmic devices are respectively connected to the resistance variable layers (18). The non-ohmic devices (20) each has a laminated-layer structure including plural semiconductor layers, a laminated-layer structure including a metal electrode layer and an insulator layer, or a laminated-layer structure including a metal electrode layer and a semiconductor layer. One layer of the laminated-layer structure is embedded to fill each of the contact holes and the semiconductor layer or the insulator layer which is the other layer of the laminated-layer structure has a larger area than an opening of each of the contact holes and is provided on the interlayer insulating layer (16).
Public/Granted literature
- US20100032641A1 NONVOLATILE SEMICONDUCTOR MEMORY APPARATUS AND MANUFACTURING METHOD THEREOF Public/Granted day:2010-02-11
Information query
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