发明授权
- 专利标题: Fabricating electronic-photonic devices having an active layer with spherical quantum dots
- 专利标题(中): 制造具有球形量子点的有源层的电子光子器件
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申请号: US12906809申请日: 2010-10-18
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公开(公告)号: US08258497B2公开(公告)日: 2012-09-04
- 发明人: Nick Sauer , Nils Weimann , Liming Zhang
- 申请人: Nick Sauer , Nils Weimann , Liming Zhang
- 申请人地址: FR Paris
- 专利权人: Alcatel Lucent
- 当前专利权人: Alcatel Lucent
- 当前专利权人地址: FR Paris
- 代理机构: Hitt Gaines, PC
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L31/102
摘要:
A method for manufacturing an electronic-photonic device. Epitaxially depositing an n-doped III-V composite semiconductor alloy buffer layer on a crystalline surface of a substrate at a first temperature. Forming an active layer on the n-doped III-V epitaxial composite semiconductor alloy buffer layer at a second temperature, the active layer including a plurality of spheroid-shaped quantum dots. Depositing a p-doped III-V composite semiconductor alloy capping layer on the active layer at a third temperature. The second temperature is less than the first temperature and the third temperature. The active layer has a photoluminescence intensity emission peak in the telecommunication C-band.
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