发明授权
US08260557B2 System and method for detecting particle generation source, and storage medium therefor
有权
用于检测粒子发生源的系统和方法及其存储介质
- 专利标题： System and method for detecting particle generation source, and storage medium therefor
- 专利标题（中）： 用于检测粒子发生源的系统和方法及其存储介质
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申请号： US12398523申请日： 2009-03-05
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公开(公告)号： US08260557B2公开(公告)日： 2012-09-04
- 发明人: Tsuyoshi Moriya
- 申请人： Tsuyoshi Moriya
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP2008-056431 20080306
- 主分类号： G01N31/00
- IPC分类号： G01N31/00 ; G06F17/18 ; G06F19/00
摘要：
A system for determining occurrence factors of particles includes a user interface device, and an apparatus for detecting the occurrence factors of particles. The apparatus for detecting the occurrence factors of particles includes a storage unit that stores a program for executing a calculation method for calculating a likelihood of each of the occurrence factors of particles in the form of a score; and a calculation unit for calculating the score for each of the occurrence factors of particles based on particle distributions at least on a surface of a substrate using the stored program. The user interface device displays the calculated score for each of the occurrence factors of particles.
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