发明授权
- 专利标题: Method and system for providing a perpendicular magnetic recording pole using multiple chemical mechanical planarizations
- 专利标题(中): 使用多个化学机械平面化提供垂直磁记录极的方法和系统
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申请号: US12824036申请日: 2010-06-25
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公开(公告)号: US08262919B1公开(公告)日: 2012-09-11
- 发明人: Guanghong Luo , Changqing Shi , Danning Yang , Jinwen Wang , Ming Jiang
- 申请人: Guanghong Luo , Changqing Shi , Danning Yang , Jinwen Wang , Ming Jiang
- 申请人地址: US CA Fremont
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Fremont
- 主分类号: B44C1/22
- IPC分类号: B44C1/22
摘要:
A method and system for providing a pole of magnetic transducer having an intermediate layer are described. The method and system include providing a trench in the intermediate layer and depositing a nonmagnetic liner. A portion of the nonmagnetic liner resides in the trench. At least one seed layer is deposited. A portion of the at least one seed layer resides in the trench. The method and system include depositing at least one main pole layer. The at least one main pole layer is magnetic. A portion of the main pole layer(s) reside in the trench. The method and system also include performing a first chemical mechanical planarization (CMP). An excess portion of the seed layer(s) external to the trench are removed through an ion beam etch. The method and system further include performing a second CMP to remove an excess portion of the nonmagnetic liner external to the trench.
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