Invention Grant
US08263189B2 Layer forming method and layer forming apparatus, and method of manufacturing radiation detector 有权
层形成方法和层形成装置以及辐射检测器的制造方法

Layer forming method and layer forming apparatus, and method of manufacturing radiation detector
Abstract:
A layer-forming apparatus coats a solution containing a layer component and a flammable solvent on a surface of a base material, and forms a layer on the surface of the base material. In the layer-forming apparatus, a coating chamber in which the solution is coated on the surface of the base material is closed substantially hermetically, and a clean air is supplied from a clean-air supplier to the coating chamber. Then, ions that are produced by a corona discharger are sprayed to the surface of the base material in a state that a vapor concentration of the solvent in the coating chamber is below a burning lower limit, and dusts are removed from the base material. Then, the solution is coated on the surface of the base material from which the dusts are removed.
Information query
Patent Agency Ranking
0/0