Invention Grant
- Patent Title: Layer forming method and layer forming apparatus, and method of manufacturing radiation detector
- Patent Title (中): 层形成方法和层形成装置以及辐射检测器的制造方法
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Application No.: US12382803Application Date: 2009-03-24
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Publication No.: US08263189B2Publication Date: 2012-09-11
- Inventor: Hiroshi Mataki , Hirotaka Watano , Seiichi Inoue
- Applicant: Hiroshi Mataki , Hirotaka Watano , Seiichi Inoue
- Applicant Address: JP Tokyo
- Assignee: Fujifilm Corporation
- Current Assignee: Fujifilm Corporation
- Current Assignee Address: JP Tokyo
- Agency: Edwards Neils PLLC
- Agent Jean C. Edwards, Esq.
- Priority: JP2008-079315 20080325
- Main IPC: C23C14/02
- IPC: C23C14/02

Abstract:
A layer-forming apparatus coats a solution containing a layer component and a flammable solvent on a surface of a base material, and forms a layer on the surface of the base material. In the layer-forming apparatus, a coating chamber in which the solution is coated on the surface of the base material is closed substantially hermetically, and a clean air is supplied from a clean-air supplier to the coating chamber. Then, ions that are produced by a corona discharger are sprayed to the surface of the base material in a state that a vapor concentration of the solvent in the coating chamber is below a burning lower limit, and dusts are removed from the base material. Then, the solution is coated on the surface of the base material from which the dusts are removed.
Public/Granted literature
- US20090246402A1 Layer forming method and layer forming apparatus, and method of manufacturing radiation detector Public/Granted day:2009-10-01
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