发明授权
- 专利标题: Back-illuminated distance measuring sensor and distance measuring device
- 专利标题(中): 背照式距离测量传感器和距离测量装置
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申请号: US12666572申请日: 2008-07-02
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公开(公告)号: US08264673B2公开(公告)日: 2012-09-11
- 发明人: Mitsuhito Mase , Takashi Suzuki , Seiichiro Mizuno , Mitsutaka Takemura
- 申请人: Mitsuhito Mase , Takashi Suzuki , Seiichiro Mizuno , Mitsutaka Takemura
- 申请人地址: JP Hamamatsu-shi, Shizuoka
- 专利权人: Hamamatsu Photonics K.K.
- 当前专利权人: Hamamatsu Photonics K.K.
- 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JP2007-175636 20070703; JP2007-175638 20070703; JP2007-175639 20070703
- 国际申请: PCT/JP2008/062005 WO 20080702
- 国际公布: WO2009/005098 WO 20090108
- 主分类号: G01C3/08
- IPC分类号: G01C3/08 ; H01L31/00
摘要:
Two charge quantities (Q1,Q2) are output from respective pixels P (m,n) of the back-illuminated distance measuring sensor 1 as signals d′(m,n) having the distance information. Since the respective pixels P (m,n) output signals d′(m,n) responsive to the distance to an object H as micro distance measuring sensors, a distance image of the object can be obtained as an aggregate of distance information to respective points on the object H if reflection light from the object H is imaged on the pickup area 1B. If carriers generated at a deep portion in the semiconductor in response to incidence of near-infrared light for projection are led in a potential well provided in the vicinity of the carrier-generated position opposed to the light incident surface side, high-speed and accurate distance measurement is enabled.
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