发明授权
- 专利标题: Structure for pattern formation, method for pattern formation, and application thereof
- 专利标题(中): 图案形成结构,图案形成方法及其应用
-
申请号: US12122833申请日: 2008-05-19
-
公开(公告)号: US08268546B2公开(公告)日: 2012-09-18
- 发明人: Hironori Kobayashi , Manabu Yamamoto , Daigo Aoki , Hironori Kamiyama , Shinichi Hikosaka , Mitsuhiro Kashiwabara
- 申请人: Hironori Kobayashi , Manabu Yamamoto , Daigo Aoki , Hironori Kamiyama , Shinichi Hikosaka , Mitsuhiro Kashiwabara
- 申请人地址: JP Tokyo-to
- 专利权人: Dai Nippon Printing Co., Ltd.
- 当前专利权人: Dai Nippon Printing Co., Ltd.
- 当前专利权人地址: JP Tokyo-to
- 代理机构: Ladas & Parry LLP
- 优先权: JP9-214845 19970808; JP9-300295 19971031; JP9-313041 19971114; JP10-100369 19980327; JP10-85955 19980331; JP10-86293 19980331; JP10-165392 19980612; JP10-167316 19980615; JP10-183370 19980615
- 主分类号: G03F7/26
- IPC分类号: G03F7/26
摘要:
A structure for pattern formation adapted for optically forming a pattern, characterized by comprising: a photocatalyst-containing layer provided on a substrate, the photocatalyst-containing layer containing a material of which the wettability is variable through photocatalytic action upon pattern-wise exposure.
公开/授权文献
信息查询
IPC分类: