发明授权
- 专利标题: Packaging substrate having through-holed interposer embedded therein and fabrication method thereof
- 专利标题(中): 嵌入有贯通孔插入件的封装基板及其制造方法
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申请号: US13074467申请日: 2011-03-29
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公开(公告)号: US08269337B2公开(公告)日: 2012-09-18
- 发明人: Yu-Shan Hu , Dyi-Chung Hu , Tzyy-Jang Tseng
- 申请人: Yu-Shan Hu , Dyi-Chung Hu , Tzyy-Jang Tseng
- 申请人地址: TW Taoyuan
- 专利权人: Unimicron Technology Corporation
- 当前专利权人: Unimicron Technology Corporation
- 当前专利权人地址: TW Taoyuan
- 代理机构: Edwards Wildman Palmer LLP
- 代理商 Peter F. Corless; Steven M. Jensen
- 优先权: TW99143617A 20101214
- 主分类号: H01L23/12
- IPC分类号: H01L23/12
摘要:
A packaging substrate having a through-holed interposer embedded therein is provided, which includes: a molding layer having opposite first and second surfaces; a through-holed interposer embedded in the molding layer and flush with the second surface; a redistribution-layer structure embedded in the molding layer and disposed on the through-holed interposer and having a plurality of electrode pads exposed from the first surface of the molding layer; and a built-up structure disposed on the second surface of the molding layer and electrically connected to the through-holed interposer. By embedding the through-holed interposer in the molding layer and forming the built-up structure on the second surface of the molding layer, the present invention eliminates the need of a core board and reduces the thickness of the overall structure. Further, since the through-holed interposer has a CIE close to or the same as that of a silicon wafer, the structural reliability during thermal cycle testing is improved.
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