发明授权
US08273592B2 Method of manufacturing group-III nitride semiconductor light emitting device, group III nitride semiconductor light emitting device and lamp
有权
III族氮化物半导体发光器件,III族氮化物半导体发光器件和灯的制造方法
- 专利标题: Method of manufacturing group-III nitride semiconductor light emitting device, group III nitride semiconductor light emitting device and lamp
- 专利标题(中): III族氮化物半导体发光器件,III族氮化物半导体发光器件和灯的制造方法
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申请号: US12513595申请日: 2007-12-05
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公开(公告)号: US08273592B2公开(公告)日: 2012-09-25
- 发明人: Yasunori Yokoyama , Hisayuki Miki
- 申请人: Yasunori Yokoyama , Hisayuki Miki
- 申请人地址: JP Tokyo
- 专利权人: Showa Denko K.K.
- 当前专利权人: Showa Denko K.K.
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2006-343019 20061220; JP2007-214539 20070821
- 国际申请: PCT/JP2007/073472 WO 20071205
- 国际公布: WO2008/075559 WO 20080626
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
The object of the present invention is to provide a method of manufacturing a Group-III nitride semiconductor light-emitting device that is highly productive and that enables production of a device having excellent light-emitting properties; a Group-III nitride semiconductor light-emitting device; and a lamp using the light emitting device. The present invention provides a method of manufacturing a Group-III nitride semiconductor light-emitting device, comprising the steps of: activating a gas including a Group-V element and a metal material with plasma, thereby reacting the gas with the metal material; forming on a substrate an intermediate layer that is made of a Group-III nitride compound; and stacking an n-type semiconductor layer that is made of a Group-III nitride semiconductor, a light-emitting layer, and a p-type semiconductor layer, sequentially on the intermediate layer, wherein the Group-V element is nitrogen, the gas fraction of nitrogen in the gas is within a range of more than 20% to less than 99% during forming of the intermediate layer, and the intermediate layer is formed into a single crystal structure.
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