发明授权
- 专利标题: Nonvolatile semiconductor memory device and method for manufacturing the same
- 专利标题(中): 非易失性半导体存储器件及其制造方法
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申请号: US12705231申请日: 2010-02-12
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公开(公告)号: US08274108B2公开(公告)日: 2012-09-25
- 发明人: Ryota Katsumata , Masaru Kito , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Yoshiaki Fukuzumi , Hideaki Aochi
- 申请人: Ryota Katsumata , Masaru Kito , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Yoshiaki Fukuzumi , Hideaki Aochi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2009-032988 20090216
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; H01L21/336
摘要:
A nonvolatile semiconductor memory device, includes: a stacked body including a plurality of insulating films alternately stacked with a plurality of electrode films, the electrode films being divided to form a plurality of control gate electrodes aligned in a first direction; a plurality of semiconductor pillars aligned in a stacking direction of the stacked body, the semiconductor pillars being arranged in a matrix configuration along the first direction and a second direction intersecting the first direction to pierce the control gate electrodes; and a connection member connecting a lower end portion of one of the semiconductor pillars to a lower end portion of one other of the semiconductor pillars, an upper end portion of the one of the semiconductor pillars being connected to a source line, an upper end portion of the one other of the semiconductor pillars being connected to a bit line. At least some of the control gate electrodes are pierced by two of the semiconductor pillars adjacent to each other in the second direction. Two of the semiconductor pillars being connected to each other by the connection member pierce mutually different control gate electrodes.
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