发明授权
- 专利标题： Method and apparatus for fluid processing a workpiece
- 专利标题（中）： 流体处理工件的方法和装置
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申请号： US13275158申请日： 2011-10-17
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公开(公告)号： US08277624B2公开(公告)日： 2012-10-02
- 发明人: Arthur Keigler , John Harrell , Zhenqiu Liu , Qunwei Wu
- 申请人： Arthur Keigler , John Harrell , Zhenqiu Liu , Qunwei Wu
- 申请人地址： US MA Billerica
- 专利权人： Tel Nexx, Inc.
- 当前专利权人： Tel Nexx, Inc.
- 当前专利权人地址： US MA Billerica
- 代理机构： Rothwell, Figg, Ernst & Manbeck, P.C.
- 主分类号： C25B9/02
- IPC分类号： C25B9/02
摘要：
A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
公开/授权文献
- US20120103799A1 METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE 公开/授权日：2012-05-03
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