Invention Grant
- Patent Title: Method and apparatus for fluid processing a workpiece
- Patent Title (中): 流体处理工件的方法和装置
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Application No.: US13275158Application Date: 2011-10-17
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Publication No.: US08277624B2Publication Date: 2012-10-02
- Inventor: Arthur Keigler , John Harrell , Zhenqiu Liu , Qunwei Wu
- Applicant: Arthur Keigler , John Harrell , Zhenqiu Liu , Qunwei Wu
- Applicant Address: US MA Billerica
- Assignee: Tel Nexx, Inc.
- Current Assignee: Tel Nexx, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Main IPC: C25B9/02
- IPC: C25B9/02
Abstract:
A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
Public/Granted literature
- US20120103799A1 METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE Public/Granted day:2012-05-03
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