Invention Grant
US08282023B2 Fluid storage and dispensing systems, and fluid supply processes comprising same
有权
流体储存和分配系统以及包括该流体储存和分配系统的流体供应过程
- Patent Title: Fluid storage and dispensing systems, and fluid supply processes comprising same
- Patent Title (中): 流体储存和分配系统以及包括该流体储存和分配系统的流体供应过程
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Application No.: US13149666Application Date: 2011-05-31
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Publication No.: US08282023B2Publication Date: 2012-10-09
- Inventor: W. Karl Olander , James V. McManus , Steven J. Hultquist , Jose I. Arno , Peter C. Van Buskirk
- Applicant: W. Karl Olander , James V. McManus , Steven J. Hultquist , Jose I. Arno , Peter C. Van Buskirk
- Applicant Address: US CT Danbury
- Assignee: Advanced Technology Materials, Inc.
- Current Assignee: Advanced Technology Materials, Inc.
- Current Assignee Address: US CT Danbury
- Agency: Hultquist, PLLC
- Agent Steven J. Hultquist; Rosa Yaghmour
- Main IPC: B01D53/02
- IPC: B01D53/02

Abstract:
Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.
Public/Granted literature
- US20110226874A1 FLUID STORAGE AND DISPENSING SYSTEMS, AND FLUID SUPPLY PROCESSES COMPRISING SAME Public/Granted day:2011-09-22
Information query
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