发明授权
- 专利标题: Thin film transistor and method of fabricating the same
- 专利标题(中): 薄膜晶体管及其制造方法
-
申请号: US12753732申请日: 2010-04-02
-
公开(公告)号: US08288216B2公开(公告)日: 2012-10-16
- 发明人: Jin-Hee Kang , Chun-Gi You , Sun Park , Jong-Hyun Park , Yul-Kyu Lee
- 申请人: Jin-Hee Kang , Chun-Gi You , Sun Park , Jong-Hyun Park , Yul-Kyu Lee
- 申请人地址: KR
- 专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: KR10-2009-0097434 20091013
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A thin film transistor (TFT) and a method of fabricating the same are disclosed. The TFT includes a substrate, a gate electrode disposed over the substrate, a gate insulating layer disposed over the gate electrode, a semiconductor layer disposed over the gate insulating layer and including a polycrystalline silicon (poly-Si) layer, an ohmic contact layer disposed over a predetermined region of the semiconductor layer, an insulating interlayer disposed over substantially an entire surface of the substrate including the ohmic contact layer, and source and drain electrodes electrically connected to the ohmic contact layer through contact holes formed in the interlayer insulating layer. A barrier layer is interposed between the semiconductor layer and the ohmic contact layer. Thus, when an off-current of a bottom-gate-type TFT is controlled, degradation of characteristics due to a leakage current may be prevented using a simple process.
公开/授权文献
- US20110084276A1 THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME 公开/授权日:2011-04-14
信息查询
IPC分类: