发明授权
- 专利标题： Laser micro-machining system with post-scan lens deflection
- 专利标题（中）： 激光微加工系统具有扫描后透镜偏转
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申请号： US12111616申请日： 2008-04-29
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公开(公告)号： US08288684B2公开(公告)日： 2012-10-16
- 发明人: Mehmet E. Alpay , Jeffrey Howerton , Patrick Leonard , Michael Nashner , David McKeever
- 申请人： Mehmet E. Alpay , Jeffrey Howerton , Patrick Leonard , Michael Nashner , David McKeever
- 申请人地址： US OR Portland
- 专利权人： Electro Scientific Industries, Inc.
- 当前专利权人： Electro Scientific Industries, Inc.
- 当前专利权人地址： US OR Portland
- 代理机构： Young Basile Hanlon & MacFarlane, PC
- 主分类号： B23K26/00
- IPC分类号： B23K26/00
摘要：
A laser micro-machining system includes a laser source positioned to direct a laser pulse through a scan lens to a work piece mounted on a work surface and a mirror positioned between the scan lens and the work piece and tilted with respect to the work surface to reflect the laser pulse toward the work piece. The mirror can be indexed to a number of positions so that only portions of the mirror are used for a number of processing steps, extending the life of the mirror.
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