Invention Grant
- Patent Title: Hetero-structured, inverted-T field effect transistor
- Patent Title (中): 异构结构,倒T型场效应晶体管
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Application No.: US11948235Application Date: 2007-11-30
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Publication No.: US08288756B2Publication Date: 2012-10-16
- Inventor: Hemant Adhikari , Rusty Harris
- Applicant: Hemant Adhikari , Rusty Harris
- Applicant Address: US TX Austin
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US TX Austin
- Agency: Williams, Morgan & Amerson
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/04

Abstract:
The present invention provides a method of forming a transistor. The method includes forming a first layer of a first semiconductor material above an insulation layer. The first semiconductor material is selected to provide high mobility to a first carrier type. The method also includes forming a second layer of a second semiconductor material above the first layer of semiconductor material. The second semiconductor material is selected to provide high mobility to a second carrier type opposite the first carrier type. The method further includes forming a first masking layer adjacent the second layer and etching the second layer through the first masking layer to form at least one feature in the second layer. Each feature in the second layer forms an inverted-T shape with a portion of the second layer.
Public/Granted literature
- US20090140294A1 HETERO-STRUCTURED, INVERTED-T FIELD EFFECT TRANSISTOR Public/Granted day:2009-06-04
Information query
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