发明授权
- 专利标题: Dual path gas distribution device
- 专利标题(中): 双路气体分配装置
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申请号: US12346195申请日: 2008-12-30
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公开(公告)号: US08293013B2公开(公告)日: 2012-10-23
- 发明人: Jay Brian DeDontney
- 申请人: Jay Brian DeDontney
- 申请人地址: US CA San Jose
- 专利权人: Intermolecular, Inc.
- 当前专利权人: Intermolecular, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: C23C16/455
- IPC分类号: C23C16/455 ; C23C16/44 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22
摘要:
An apparatus for deploying two fluids separately into a reaction chamber is provided. The apparatus includes a first distribution network that is formed on a plate having a distribution face and a dispensing face. The first distribution network is defined by a plurality of recessed channels on the distribution face. The plurality of recessed channels includes a plurality of thru-ports that extend from the plurality of recessed channels to the dispensing face. The apparatus further includes a second distribution network that has passages formed below the plurality of recessed channels and above the dispensing face. A first set of ports extends from the passages to the distribution face and a second set of ports extends from a top surface of the distribution face to the dispensing face.
公开/授权文献
- US20100167551A1 DUAL PATH GAS DISTRIBUTION DEVICE 公开/授权日:2010-07-01
信息查询
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