Plasma deposited microporous analyte detection layers, method of forming analyte detection layers, and analyte sensors including the same are disclosed. An analyte sensor includes a substrate and a microporous amorphous random covalent network layer. The microporous amorphous random covalent network layer includes silicon, carbon, hydrogen and oxygen with a mean pore size in a range from 0.5 to 10 nanometers and an optical thickness in a range from 0.2 to 2 micrometers.