发明授权
- 专利标题: Method of forming package-on-package and device related thereto
- 专利标题(中): 形成包装封装的方法和与其相关的装置
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申请号: US13027511申请日: 2011-02-15
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公开(公告)号: US08293580B2公开(公告)日: 2012-10-23
- 发明人: Tae-Hun Kim , Jin-Woo Park , Dae-Young Choi , Mi-Yeon Kim , Sun-Hye Lee
- 申请人: Tae-Hun Kim , Jin-Woo Park , Dae-Young Choi , Mi-Yeon Kim , Sun-Hye Lee
- 申请人地址: KR Gyeonggi-Do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-Do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2010-0026393 20100324
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L23/02
摘要:
Provided is a method of forming a package-on-package. An encapsulation is formed to cover a wafer using a wafer level molding process. The wafer includes a plurality of semiconductor chips and a plurality of through silicon vias (TSVs) passing through the semiconductor chips. The encapsulant may have openings aligned with the TSVs. The encapsulant and the semiconductor chips are divided to form a plurality of semiconductor packages. Another semiconductor package is stacked on one selected from the semiconductor packages. The other semiconductor package is electrically connected to the TSVs.
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