Invention Grant
US08295963B2 Methods for performing data management for a recipe-and-component control module 有权
用于执行配方和组件控制模块的数据管理的方法

Methods for performing data management for a recipe-and-component control module
Abstract:
A computer-implemented method for performing data management in a plasma processing system is provided. The method includes providing a recipe-and component control module (RACCM). The RACCM is a server that includes a plurality of intelligent agents, which are configured to interact with the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents. The RACCM further includes a set of provisional agents, which is configured to perform recipe management by distributing at least part of a recipe to at least one of the plurality of intelligent agents and the coordinating agent.
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