Invention Grant
US08295963B2 Methods for performing data management for a recipe-and-component control module
有权
用于执行配方和组件控制模块的数据管理的方法
- Patent Title: Methods for performing data management for a recipe-and-component control module
- Patent Title (中): 用于执行配方和组件控制模块的数据管理的方法
-
Application No.: US12693267Application Date: 2010-01-25
-
Publication No.: US08295963B2Publication Date: 2012-10-23
- Inventor: Chung-Ho Huang , Andrew Lui
- Applicant: Chung-Ho Huang , Andrew Lui
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G06F15/173

Abstract:
A computer-implemented method for performing data management in a plasma processing system is provided. The method includes providing a recipe-and component control module (RACCM). The RACCM is a server that includes a plurality of intelligent agents, which are configured to interact with the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents. The RACCM further includes a set of provisional agents, which is configured to perform recipe management by distributing at least part of a recipe to at least one of the plurality of intelligent agents and the coordinating agent.
Public/Granted literature
- US20100125360A1 METHODS FOR PERFORMING DATA MANAGEMENT FOR A RECIPE-AND-COMPONENT CONTROL MODULE Public/Granted day:2010-05-20
Information query