发明授权
- 专利标题: Media isolated differential pressure sensor with cap
- 专利标题(中): 介质隔离差压传感器带盖
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申请号: US12126494申请日: 2008-05-23
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公开(公告)号: US08297125B2公开(公告)日: 2012-10-30
- 发明人: Carl Stewart , Richard Alan Davis , Gilberto Morales
- 申请人: Carl Stewart , Richard Alan Davis , Gilberto Morales
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理机构: Seager Tufte & Wickhem LLC
- 主分类号: G01L13/02
- IPC分类号: G01L13/02 ; G01L15/00
摘要:
A differential pressure sensor includes two pressure ports for allowing media to pass into contact with both the top and bottom sides of the diaphragm. A silicon pressure sensor die can be attached between the pressure ports using die attach materials for sensing a differential pressure between the media to evaluate media differential pressure. A cap with an opening can be placed on topside of a diaphragm formed in the silicon pressure die. The silicon pressure die can include die bond pads that can be electrically connected to the diaphragm to output electrical signals. The cap can seal the die bond pads from the harsh media and route the electrical signals therein. Media can pass through the opening in the cap such that a media path to the top of the diaphragm is not exposed to the die bond pads of the silicon pressure die to ensure long-term sensor reliability.
公开/授权文献
- US20090288492A1 MEDIA ISOLATED DIFFERENTIAL PRESSURE SENSOR WITH CAP 公开/授权日:2009-11-26