发明授权
- 专利标题: Transparent conductor based pinned photodiode
- 专利标题(中): 透明导体固定光电二极管
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申请号: US12704769申请日: 2010-02-12
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公开(公告)号: US08298846B2公开(公告)日: 2012-10-30
- 发明人: Chandra Mouli , Howard E. Rhodes
- 申请人: Chandra Mouli , Howard E. Rhodes
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Dickstein Shapiro LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A pinned photodiode with improved short wavelength light response. In exemplary embodiments of the invention, a gate oxide is formed over a doped, buried region in a semiconductor substrate. A gate conductor is formed on top of the gate oxide. The gate conductor is transparent, and in one embodiment is a layer of indium-tin oxide. The transparent conductor can be biased to reduce the need for a surface dopant in creating a pinned photodiode region. The biasing of the transparent conductor produces a hole-rich accumulation region near the surface of the substrate. The gate conductor material permits a greater amount of charges from short wavelength light to be captured in the photo-sensing region in the substrate, and thereby increases the quantum efficiency of the photosensor.
公开/授权文献
- US20100201859A1 Transparent Conductor Based Pinned Photodiode 公开/授权日:2010-08-12
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