A method of fabricating a liquid film is provided. The method comprises the steps of applying hydrophilic liquid onto a substrate with an electrode formed thereunder, covering the hydrophilic liquid with a protection film comprising hydrophobic liquid, dispersing surfactant for reducing the surface tension between the hydrophilic liquid and the protection film, and applying voltage to the hydrophilic liquid and the electrode to wet the substrate with the hydrophilic liquid. With the surfactant and the electro-wetting principle, a contact angle between the hydrophilic liquid and the substrate is controlled. The liquid film having a uniform thickness in nano size is thus formed on the substrate. The protection film prevents the evaporation of the liquid film in the air to thereby secure the stability of the liquid film.