发明授权
- 专利标题: Method of measuring characteristics of specimen and flat-plate periodic structure
- 专利标题(中): 测量样品和平板周期结构特征的方法
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申请号: US13405651申请日: 2012-02-27
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公开(公告)号: US08304732B2公开(公告)日: 2012-11-06
- 发明人: Seiji Kamba , Kazuhiro Takigawa , Takashi Kondo , Koji Tanaka
- 申请人: Seiji Kamba , Kazuhiro Takigawa , Takashi Kondo , Koji Tanaka
- 申请人地址: JP Nagaokakyo-Shi, Kyoto-fu
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Nagaokakyo-Shi, Kyoto-fu
- 代理机构: Dickstein Shapiro LLP
- 优先权: JP2009-203824 20090903
- 主分类号: G01J5/02
- IPC分类号: G01J5/02
摘要:
A measuring method that includes holding a specimen to be measured on a flat-plate periodic structure, applying a linearly-polarized electromagnetic wave to the flat-plate periodic structure, detecting the electromagnetic wave scattered forward or backward by the flat-plate periodic structure, and measuring characteristics of the specimen on the basis of a phenomenon that a dip waveform appearing in a frequency characteristic of the forward-scattered electromagnetic wave or a peak waveform appearing in a frequency characteristic of the backward-scattered electromagnetic wave is changed with the presence of the specimen. The flat-plate periodic structure is a flat-plate structure in which at least two voids penetrating through the structure in a direction perpendicular to a principal surface thereof are periodically arrayed in at least one direction on the principal surface, and the electromagnetic wave is applied to the principal surface of the flat-plate periodic structure from the direction perpendicular to the principal surface.