发明授权
US08304793B2 III-nitride semiconductor optical device and epitaxial substrate
有权
III族氮化物半导体光学器件和外延衬底
- 专利标题: III-nitride semiconductor optical device and epitaxial substrate
- 专利标题(中): III族氮化物半导体光学器件和外延衬底
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申请号: US12836117申请日: 2010-07-14
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公开(公告)号: US08304793B2公开(公告)日: 2012-11-06
- 发明人: Yusuke Yoshizumi , Yohei Enya , Katsushi Akita , Masaki Ueno , Takashi Kyono , Takao Nakamura
- 申请人: Yusuke Yoshizumi , Yohei Enya , Katsushi Akita , Masaki Ueno , Takashi Kyono , Takao Nakamura
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 代理机构: Venable LLP
- 代理商 Michael A. Sartori
- 优先权: JP2009-167177 20090715
- 主分类号: H01L33/00
- IPC分类号: H01L33/00
摘要:
A III-nitride semiconductor optical device has a support base comprised of a III-nitride semiconductor, an n-type gallium nitride based semiconductor layer, a p-type gallium nitride based semiconductor layer, and an active layer. The support base has a primary surface at an angle with respect to a reference plane perpendicular to a reference axis extending in a c-axis direction of the III-nitride semiconductor. The n-type gallium nitride based semiconductor layer is provided over the primary surface of the support base. The p-type gallium nitride based semiconductor layer is doped with magnesium and is provided over the primary surface of the support base. The active layer is provided between the n-type gallium nitride based semiconductor layer and the p-type gallium nitride based semiconductor layer over the primary surface of the support base. The angle is in the range of not less than 40° and not more than 140°. The primary surface demonstrates either one of semipolar nature and nonpolar nature. The p-type gallium nitride based semiconductor layer contains carbon as a p-type dopant. A carbon concentration of the p-type gallium nitride based semiconductor layer is not less than 2×1016 cm−3, and the carbon concentration of the p-type gallium nitride based semiconductor layer is not more than 1×1019 cm−3.
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