Invention Grant
US08309432B2 Epitaxial lift off stack having a universally shrunk handle and methods thereof
有权
具有普遍收缩手柄的外延提升堆叠及其方法
- Patent Title: Epitaxial lift off stack having a universally shrunk handle and methods thereof
- Patent Title (中): 具有普遍收缩手柄的外延提升堆叠及其方法
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Application No.: US12475411Application Date: 2009-05-29
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Publication No.: US08309432B2Publication Date: 2012-11-13
- Inventor: Melissa Archer , Harry Atwater , Thomas Gmitter , Gang He , Andreas Hegedus , Gregg Higashi , Stewart Sonnenfeldt
- Applicant: Melissa Archer , Harry Atwater , Thomas Gmitter , Gang He , Andreas Hegedus , Gregg Higashi , Stewart Sonnenfeldt
- Applicant Address: unknown Santa Clara
- Assignee: Alta Devices, Inc.
- Current Assignee: Alta Devices, Inc.
- Current Assignee Address: unknown Santa Clara
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46 ; H01L21/302 ; H01L21/461

Abstract:
Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a sacrificial layer on a substrate, adhering a universally shrinkable support handle onto the epitaxial material, wherein the universally shrinkable support handle contains a shrinkable material, and shrinking the support handle to form tension in the support handle and compression in the epitaxial material during a shrinking process. The method further includes removing the sacrificial layer during an etching process, peeling the epitaxial material from the substrate while forming an etch crevice therebetween, and bending the support handle to have substantial curvature.
Public/Granted literature
- US20090321885A1 EPITAXIAL LIFT OFF STACK HAVING A UNIVERSALLY SHRUNK HANDLE AND METHODS THEREOF Public/Granted day:2009-12-31
Information query
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