Invention Grant
- Patent Title: Method of manufacturing optical sensor
- Patent Title (中): 光学传感器的制造方法
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Application No.: US13211161Application Date: 2011-08-16
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Publication No.: US08309433B2Publication Date: 2012-11-13
- Inventor: Yasuhiro Matsuki , Takanori Suzuki , Koji Tsuduki , Shin Hasegawa , Tadashi Kosaka , Akiya Nakayama
- Applicant: Yasuhiro Matsuki , Takanori Suzuki , Koji Tsuduki , Shin Hasegawa , Tadashi Kosaka , Akiya Nakayama
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2010-191323 20100827
- Main IPC: H01L21/30
- IPC: H01L21/30

Abstract:
A method of manufacturing an optical sensor includes the steps of providing a semiconductor wafer having a plurality of pixel areas; forming a grid-like rib enclosing each pixel area on the semiconductor wafer, the grid-like rib having a predetermined width and being formed from a fixing member; providing a light-transmissive substrate having a gap portion on a main surface thereof, the gap portion having at least one of a groove having a width smaller than the grid-like rib and a plurality of through-holes; fixing the semiconductor wafer and the light-transmissive substrate such that the grid-like rib and the gap portion face each other; and cutting the fixed semiconductor wafer and light-transmissive substrate into pieces such that each piece includes one pixel area.
Public/Granted literature
- US20120052612A1 METHOD OF MANUFACTURING OPTICAL SENSOR Public/Granted day:2012-03-01
Information query
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