发明授权
- 专利标题： Processing apparatus using ultrashort pulse laser
- 专利标题（中）： 使用超短脉冲激光的处理装置
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申请号： US12532187申请日： 2007-12-27
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公开(公告)号： US08309879B2公开(公告)日： 2012-11-13
- 发明人: Won-Seok Chang , Jae-Gu Kim , Sung-Hak Cho
- 申请人： Won-Seok Chang , Jae-Gu Kim , Sung-Hak Cho
- 申请人地址： KR Daejeon
- 专利权人： Korea Institute of Machinery & Materials
- 当前专利权人： Korea Institute of Machinery & Materials
- 当前专利权人地址： KR Daejeon
- 代理机构： Lexyoume IP Meister, PLLC.
- 优先权： KR10-2007-0032330 20070402
- 国际申请： PCT/KR2007/006893 WO 20071227
- 国际公布： WO2008/120853 WO 20081009
- 主分类号： B23K26/00
- IPC分类号： B23K26/00 ; B23K26/02
摘要：
The present invention relates to an ultrashort pulse laser processing device. The ultrashort pulse laser includes a stage a transfer member, a front confocal microscope, a front laser generating unit, and a front highpowered lens. A sample is provided on the stage to be processed, the transfer member transfers the stage, and the front confocal microscope is provided above the stage. The front laser generating unit is provided between the front confocal microscope and the stage to generate an ultrashort pulse laser, and the front high-powered lens focuses the laser provided from the front laser generating unit.
公开/授权文献
- US20100108649A1 PROCESSING APPARATUS USING ULTRASHORT PULSE LASER 公开/授权日：2010-05-06