发明授权
- 专利标题: Semiconductor memory device and method of manufacturing same
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US12872284申请日: 2010-08-31
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公开(公告)号: US08309958B2公开(公告)日: 2012-11-13
- 发明人: Jun Hirota , Yoko Iwakaji , Moto Yabuki
- 申请人: Jun Hirota , Yoko Iwakaji , Moto Yabuki
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-058780 20100316
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/12 ; H01L45/00
摘要:
According to one embodiment, a semiconductor memory device includes a word line interconnection layer, a bit line interconnection layer and a pillar. The word line interconnection layer includes a plurality of word lines which extend in a first direction. The bit line interconnection layer includes a plurality of bit lines which extend in a second direction crossing over the first direction. The pillar is arranged between each of the word lines and each of the bit lines. The pillar includes a silicon diode and a variable resistance film, and the silicon diode includes a p-type portion and an n-type portion. The word line interconnection layer and the bit line interconnection layer are alternately stacked, and a compressive force is applied to the silicon diode in a direction in which the p-type portion and the n-type portion become closer to each other.
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