发明授权
- 专利标题: Memory structure having a floating body and method for fabricating the same
- 专利标题(中): 具有浮体的存储结构及其制造方法
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申请号: US13102039申请日: 2011-05-05
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公开(公告)号: US08309998B2公开(公告)日: 2012-11-13
- 发明人: Tzung-Han Lee , Chung-Yuan Lee
- 申请人: Tzung-Han Lee , Chung-Yuan Lee
- 申请人地址: TW Hwa-Ya Technology Park Kueishan, Taoyuan
- 专利权人: Inotera Memories, Inc.
- 当前专利权人: Inotera Memories, Inc.
- 当前专利权人地址: TW Hwa-Ya Technology Park Kueishan, Taoyuan
- 代理商 Winston Hsu; Scott Margo
- 优先权: TW100100048A 20110103
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A memory structure having a floating body is provided, which includes a substrate including an active area and an isolation structure surrounding the active area, a first source/drain region in the substrate in the active area, a first floating body in the substrate above the first source/drain region, a second floating body on the first floating body, a second source/drain region on the second floating body, and a trench-type gate structure in the substrate and beside the first floating body. A method of fabricating a memory structure having a floating body is also provided.
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