发明授权
US08310030B2 III-nitride crystal substrate and III-nitride semiconductor device
有权
III族氮化物晶体衬底和III族氮化物半导体器件
- 专利标题: III-nitride crystal substrate and III-nitride semiconductor device
- 专利标题(中): III族氮化物晶体衬底和III族氮化物半导体器件
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申请号: US13178479申请日: 2011-07-07
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公开(公告)号: US08310030B2公开(公告)日: 2012-11-13
- 发明人: Ryu Hirota , Koji Uematsu , Tomohiro Kawase
- 申请人: Ryu Hirota , Koji Uematsu , Tomohiro Kawase
- 申请人地址: JP Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka
- 代理商 James W. Judge
- 优先权: JP2007-006973 20070116; JP2007-114480 20070424
- 主分类号: H01L29/02
- IPC分类号: H01L29/02 ; H01L21/20
摘要:
Affords methods of manufacturing bulk III-nitride crystals whereby at least the surface dislocation density is low globally. The present III-nitride crystal manufacturing method includes: a step of preparing an undersubstrate (1) containing a III-nitride seed crystal, the III-nitride seed crystal having a matrix (1s), and inversion domains (1t) in which the polarity in the directions is inverted with respect to the matrix (1s); and a step of growing a III-nitride crystal (10) onto the matrix (1s) and inversion domains (it) of the undersubstrate (1) by a liquid-phase technique; and is characterized in that a first region (10s), being where the growth rate of III-nitride crystal (10) growing onto the matrix (1s) is greater, covers second regions (10t), being where the growth rate of III-nitride crystal (10) growing onto the inversion domains (1t) is lesser.
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