发明授权
- 专利标题: Resonator element and resonator
- 专利标题(中): 谐振元件和谐振器
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申请号: US12704450申请日: 2010-02-11
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公开(公告)号: US08310137B2公开(公告)日: 2012-11-13
- 发明人: Masahiro Ishii , Takeo Funakawa
- 申请人: Masahiro Ishii , Takeo Funakawa
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2009-029895 20090212
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; H03H9/19
摘要:
A resonator element includes: three or more resonating arms, each of the resonating arms including; a lower electrode provided on a first surface of the resonating arm, a piezoelectric film formed on the lower electrode, an upper electrode formed on the piezoelectric film, a first wiring line coupled to the lower electrode, and a second wiring line coupled to the upper electrode; and a base to which the resonating arms are connected. In the resonator element, the resonating arm vibrates in a thickness direction of the resonating arm. The resonating arms adjacent to each other vibrate in opposite directions from each other. The first surface is opposed to a second surface in the thickness direction. The second wiring line is drawn out to the second surface through side surfaces of the resonating arm so as to surround the resonating arm.
公开/授权文献
- US20100201223A1 RESONATOR ELEMENT AND RESONATOR 公开/授权日:2010-08-12
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