发明授权
- 专利标题: SOI trench DRAM structure with backside strap
- 专利标题(中): 具有背面带的SOI沟槽DRAM结构
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申请号: US12847208申请日: 2010-07-30
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公开(公告)号: US08318574B2公开(公告)日: 2012-11-27
- 发明人: Bruce B. Doris , Kangguo Cheng , Ali Khakifirooz , Pranita Kulkarni , Ghavam G. Shahidi
- 申请人: Bruce B. Doris , Kangguo Cheng , Ali Khakifirooz , Pranita Kulkarni , Ghavam G. Shahidi
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Harrington & Smith
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
In one exemplary embodiment, a semiconductor structure including: a SOI substrate having of a top silicon layer overlying an insulation layer, the insulation layer overlies a bottom silicon layer; a capacitor disposed at least partially in the insulation layer; a device disposed at least partially on the top silicon layer, where the device is coupled to a doped portion of the top silicon layer; a backside strap of first epitaxially-deposited material, at least a first portion of the backside strap underlies the doped portion of the top silicon layer, the backside strap is coupled to the doped portion of the top silicon layer at a first end of the backside strap and to the capacitor at a second end of the backside strap; and second epitaxially-deposited material that at least partially overlies the doped portion of the top silicon layer, the second epitaxially-deposited material further at least partially overlies the first portion.
公开/授权文献
- US20120025288A1 SOI Trench DRAM Structure With Backside Strap 公开/授权日:2012-02-02
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