发明授权
US08320658B2 Unevenness inspection method, method for manufacturing display panel, and unevenness inspection apparatus
失效
不均匀性检查方法,显示面板的制造方法以及不均匀性检查装置
- 专利标题: Unevenness inspection method, method for manufacturing display panel, and unevenness inspection apparatus
- 专利标题(中): 不均匀性检查方法,显示面板的制造方法以及不均匀性检查装置
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申请号: US11851806申请日: 2007-09-07
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公开(公告)号: US08320658B2公开(公告)日: 2012-11-27
- 发明人: Hiroyuki Tanizaki , Naoko Toyoshima , Yosuke Okamoto , Yasunori Takase
- 申请人: Hiroyuki Tanizaki , Naoko Toyoshima , Yosuke Okamoto , Yasunori Takase
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2006-243274 20060907
- 主分类号: G01N21/00
- IPC分类号: G01N21/00 ; G06K9/00
摘要:
An unevenness inspection method for inspecting presence of unevenness in a panel material, the method includes: acquiring a plurality of primary images by imaging the panel material under inspection on a plurality of levels of condition; creating a plurality of secondary images by processing the plurality of primary images to enhance variation of the image; creating a composite image by combining the plurality of secondary images with a prescribed weighting; and determining the presence of unevenness using the composite image, the prescribed weighting being determined so that a region having the unevenness can be distinguished from the other region, when the plurality of secondary images are created for the panel material for training use having unevenness and are combined into a composite image.
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