发明授权
US08324041B2 Complementary stress liner to improve DGO/AVT devices and poly and diffusion resistors
有权
互补应力衬垫,用于改善DGO / AVT器件和聚和扩散电阻器
- 专利标题: Complementary stress liner to improve DGO/AVT devices and poly and diffusion resistors
- 专利标题(中): 互补应力衬垫,用于改善DGO / AVT器件和聚和扩散电阻器
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申请号: US13023794申请日: 2011-02-09
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公开(公告)号: US08324041B2公开(公告)日: 2012-12-04
- 发明人: Stefan Flachowsky , Jan Hoentschel , Thilo Scheiper
- 申请人: Stefan Flachowsky , Jan Hoentschel , Thilo Scheiper
- 申请人地址: KY Grand Cayman
- 专利权人: Globalfoundries Inc.
- 当前专利权人: Globalfoundries Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Ditthavong Mori & Steiner, P.C.
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
Electron mobility and hole mobility is improved in long channel semiconductor devices and resistors by employing complementary stress liners. Embodiments include forming a long channel semiconductor device on a substrate, and forming a complementary stress liner on the semiconductor device. Embodiments include forming a resistor on a substrate, and tuning the resistance of the resistor by forming a complementary stress liner on the resistor. Compressive stress liners are employed for improving electron mobility in n-type devices, and tensile stress liners are employed for improving hole mobility in p-type devices.
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