发明授权
US08325457B2 Electrostatic chuck and device of manufacturing organic light emitting diode having the same 有权
静电吸盘和制造有机发光二极管的装置

Electrostatic chuck and device of manufacturing organic light emitting diode having the same
摘要:
The present invention discloses an electrostatic chuck sucking and supporting a substrate with an electrostatic force and an OLED manufacturing apparatus having the same. The electrostatic chuck includes an insulating plate having at least one opening penetrating a center thereof, a pair of electrodes mounted on the insulating plate, a first controller applying a voltage to the pair of electrodes, and an electrostatic charge removing unit disposed near the insulating plate and emitting ions into the at least one opening to remove electrostatic charges distributed around a side of the insulating plate.
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