发明授权
- 专利标题: Electrostatic chuck and device of manufacturing organic light emitting diode having the same
- 专利标题(中): 静电吸盘和制造有机发光二极管的装置
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申请号: US12585895申请日: 2009-09-28
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公开(公告)号: US08325457B2公开(公告)日: 2012-12-04
- 发明人: Sang-Young Park , Ju-Eel Mun , You-Min Cha , Won-Woong Jung
- 申请人: Sang-Young Park , Ju-Eel Mun , You-Min Cha , Won-Woong Jung
- 申请人地址: KR Gibeung-Gu, Yongin, Gyeonggi-Do
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Gibeung-Gu, Yongin, Gyeonggi-Do
- 代理商 Robert E. Bushnell, Esq.
- 优先权: KR10-2009-0006200 20090123
- 主分类号: H01T23/00
- IPC分类号: H01T23/00
摘要:
The present invention discloses an electrostatic chuck sucking and supporting a substrate with an electrostatic force and an OLED manufacturing apparatus having the same. The electrostatic chuck includes an insulating plate having at least one opening penetrating a center thereof, a pair of electrodes mounted on the insulating plate, a first controller applying a voltage to the pair of electrodes, and an electrostatic charge removing unit disposed near the insulating plate and emitting ions into the at least one opening to remove electrostatic charges distributed around a side of the insulating plate.
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