发明授权
- 专利标题: Reflective mask blank, method of manufacturing a reflective mask blank and method of manufacturing a reflective mask
- 专利标题(中): 反光掩模板,反射掩模坯料的制造方法和反射掩模的制造方法
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申请号: US12761019申请日: 2010-04-15
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公开(公告)号: US08329361B2公开(公告)日: 2012-12-11
- 发明人: Morio Hosoya
- 申请人: Morio Hosoya
- 申请人地址: JP Tokyo
- 专利权人: Hoya Corporation
- 当前专利权人: Hoya Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2009-098621 20090415
- 主分类号: G03F1/24
- IPC分类号: G03F1/24
摘要:
Provided are a reflective mask blank and a reflective mask that can improve the contrast for EUV exposure light in use of the mask and further can improve the pattern resolution at a pattern edge portion of the mask, thereby enabling high-resolution pattern transfer. A reflective mask blank of this invention has a substrate and, further, a multilayer reflective film adapted to reflect the EUV exposure light and an absorber film adapted to absorb the EUV exposure light, which are formed in this order over the substrate. The absorber film is made of a material containing Ta and has a film density of 6.0 to 16.0 g/cm3. A reflective mask is obtained by forming a transfer pattern in the absorber film of the reflective mask blank.
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