发明授权
US08330072B2 System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology
有权
使用接近技术的干式,干式,低缺陷激光切割的系统方法和装置
- 专利标题: System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology
- 专利标题(中): 使用接近技术的干式,干式,低缺陷激光切割的系统方法和装置
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申请号: US12687106申请日: 2010-01-13
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公开(公告)号: US08330072B2公开(公告)日: 2012-12-11
- 发明人: John M. Boyd , Fred C. Redeker
- 申请人: John M. Boyd , Fred C. Redeker
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla Group, LLP
- 主分类号: B23K26/14
- IPC分类号: B23K26/14 ; B23K26/16
摘要:
A substrate processing system includes a first, movable surface tension gradient device, a dicing device and a system controller. The first, movable surface tension gradient device is capable of supporting a first process within a first meniscus. The first meniscus being supported between the first surface tension gradient device and a first surface of the substrate. The first movable surface tension gradient device capable of being moved relative to the first surface of the substrate. The dicing device is oriented to a desired dicing location. The desired dicing location being encompassed by the meniscus. The system controller is coupled to the dicing device and the surface tension gradient device. The system controller includes a process recipe. A method for dicing a substrate is also described. The method of dicing a substrate including placing a substrate in a substrate dicing system, forming a meniscus between a proximity head and a first surface of the substrate, dicing the substrate at a desired dicing location and simultaneously capturing any particles and contaminants generated by dicing the substrate within the meniscus, the meniscus including the desired dicing location and moving the meniscus in a desired dicing direction.
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