发明授权
- 专利标题: Semiconductor nanowire transistor
- 专利标题(中): 半导体纳米线晶体管
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申请号: US11922243申请日: 2006-06-16
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公开(公告)号: US08330143B2公开(公告)日: 2012-12-11
- 发明人: Lars-Erik Wernersson , Tomas Bryllert , Erik Lind , Lars Samuelson
- 申请人: Lars-Erik Wernersson , Tomas Bryllert , Erik Lind , Lars Samuelson
- 申请人地址: SE Lund
- 专利权人: QuNano AB
- 当前专利权人: QuNano AB
- 当前专利权人地址: SE Lund
- 代理机构: The Marbury Law Group PLLC
- 优先权: SE0501376-8 20050616
- 国际申请: PCT/SE2006/050204 WO 20060616
- 国际公布: WO2006/135336 WO 20061221
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L31/00
摘要:
A nanowire wrap-gate transistor is realized in a semiconductor material with a band gap narrower than Si. The strain relaxation in the nanowires allows the transistor to be placed on a large variety of substrates and heterostructures to be incorporated in the device. Various types of heterostructures should be introduced in the transistor to reduce the output conductance via reduced impact ionization rate, increase the current on/off ratio, reduction of the sub-threshold slope, reduction of transistor contact resistance and improved thermal stability. The parasitic capacitances should be minimized by the use of semi-insulating substrates and the use of cross-bar geometry between the source and drain access regions. The transistor may find applications in digital high frequency and low power circuits as well as in analogue high frequency circuits.
公开/授权文献
- US20090321716A1 Semiconductor Nanowire Transistor 公开/授权日:2009-12-31
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