发明授权
- 专利标题: Ultrahigh density monolithic three dimensional vertical NAND string memory device and method of making thereof
- 专利标题(中): 超高密度单片三维垂直NAND串存储器件及其制造方法
-
申请号: US13451009申请日: 2012-04-19
-
公开(公告)号: US08330208B2公开(公告)日: 2012-12-11
- 发明人: Johann Alsmeier , Vinod Robert Purayath , Henry Chien , George Matamis , Yao-Sheng Lee , James Kai , Yuan Zhang
- 申请人: Johann Alsmeier , Vinod Robert Purayath , Henry Chien , George Matamis , Yao-Sheng Lee , James Kai , Yuan Zhang
- 申请人地址: US TX Plano
- 专利权人: SanDisk Technologies Inc.
- 当前专利权人: SanDisk Technologies Inc.
- 当前专利权人地址: US TX Plano
- 代理机构: The Marbury Law Group PLLC
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
Monolithic, three dimensional NAND strings include a semiconductor channel, at least one end portion of the semiconductor channel extending substantially perpendicular to a major surface of a substrate, a plurality of control gate electrodes having a strip shape extending substantially parallel to the major surface of the substrate, the blocking dielectric comprising a plurality of blocking dielectric segments, a plurality of discrete charge storage segments, and a tunnel dielectric located between each one of the plurality of the discrete charge storage segments and the semiconductor channel.
公开/授权文献
信息查询
IPC分类: