Invention Grant
- Patent Title: Method for fabricating a direct wafer bonded optoelectronic device
- Patent Title (中): 制造直接晶圆键合光电器件的方法
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Application No.: US12752977Application Date: 2010-04-01
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Publication No.: US08334151B2Publication Date: 2012-12-18
- Inventor: Akihiko Murai , Christina Ye Chen , Daniel B. Thompson , Lee S. McCarthy , Steven P. DenBaars , Shuji Nakamura , Umesh K. Mishra
- Applicant: Akihiko Murai , Christina Ye Chen , Daniel B. Thompson , Lee S. McCarthy , Steven P. DenBaars , Shuji Nakamura , Umesh K. Mishra
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Gates & Cooper LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An (Al, Ga, In)N and ZnO direct wafer bonded light emitting diode (LED), wherein light passes through electrically conductive ZnO. Flat and clean surfaces are prepared for both the (Al, Ga, In)N and ZnO wafers. A wafer bonding process is then performed between the (Al, Ga, In)N and ZnO wafers, wherein the (Al, Ga, In)N and ZnO wafers are joined together and then wafer bonded in a nitrogen ambient under uniaxial pressure at a set temperature for a set duration. After the wafer bonding process, ZnO is shaped for increasing light extraction from inside of LED.
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