发明授权
- 专利标题: Apparatus for adjusting ion beam by bended bar magnets
- 专利标题(中): 用于通过弯曲棒磁体调节离子束的装置
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申请号: US13012759申请日: 2011-01-24
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公开(公告)号: US08334517B2公开(公告)日: 2012-12-18
- 发明人: Ko-Chuan Jen , Zhimin Wan
- 申请人: Ko-Chuan Jen , Zhimin Wan
- 申请人地址: TW Hsin-Chu
- 专利权人: Advanced Ion Beam Technology, Inc.
- 当前专利权人: Advanced Ion Beam Technology, Inc.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Stout, Uxa, Buyan & Mullins, LLP
- 主分类号: H01J3/24
- IPC分类号: H01J3/24 ; G21K5/04
摘要:
Apparatus and method for adjusting an ion beam between a mass analyzer and a substrate holder. Herein, one or more bended, such as arch-shaped, curved or zigzag shaped, bar magnets are configured to apply one or more magnetic fields to adjust the shape or cross section of an ion beam passing through a space partially surrounded by the one or more bended bar magnets. At least one of the gap width between neighbor bended bar magnets, the curvature of each bended bar magnet and the current flowing through each bended bar magnet may be fixed or adjusted dependently or independently. Therefore, the Lorentz force applied on the ion beam along different directions may be changed in a desired manner, and then the ion beam may be flexibly elongated, compressed or shaped to meet the process requirement.
公开/授权文献
- US20120187290A1 APPARATUS FOR ADJUSTING ION BEAM BY BENDED BAR MAGNETS 公开/授权日:2012-07-26