Invention Grant
- Patent Title: Substrate support system having a plurality of contact lands
- Patent Title (中): 基板支撑系统具有多个接触平台
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Application No.: US12548649Application Date: 2009-08-27
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Publication No.: US08334967B2Publication Date: 2012-12-18
- Inventor: Pawan Kumar Nimmakayala , Sidlgata V. Sreenivasan
- Applicant: Pawan Kumar Nimmakayala , Sidlgata V. Sreenivasan
- Applicant Address: US TX Austin
- Assignee: Board of Regents, The University of Texas System
- Current Assignee: Board of Regents, The University of Texas System
- Current Assignee Address: US TX Austin
- Agent Cameron A. King
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03B27/62
Abstract:
The present invention includes a substrate support system having a chuck body. The chuck body includes a body surface with a pin extending therefrom having a contact surface lying in a plane. The pin may be movably coupled to the chuck body to move with respect to the plane. The pin may also include a cross-member having multiple contact lands.
Public/Granted literature
- US20100007868A1 Substrate Support System Having a Plurality of Contact Lands Public/Granted day:2010-01-14
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