发明授权
US08338296B2 Method for forming a catalyst suitable for growth of carbon nanotubes
有权
形成适合碳纳米管生长的催化剂的方法
- 专利标题: Method for forming a catalyst suitable for growth of carbon nanotubes
- 专利标题(中): 形成适合碳纳米管生长的催化剂的方法
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申请号: US13096310申请日: 2011-04-28
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公开(公告)号: US08338296B2公开(公告)日: 2012-12-25
- 发明人: Hari Pathangi Sriraman , Ann Witvrouw , Philippe M. Vereecken
- 申请人: Hari Pathangi Sriraman , Ann Witvrouw , Philippe M. Vereecken
- 申请人地址: BE Leuven BE Leuven
- 专利权人: IMEC,Katholieke Universiteit Leuven, K.U. LEUVEN R&D
- 当前专利权人: IMEC,Katholieke Universiteit Leuven, K.U. LEUVEN R&D
- 当前专利权人地址: BE Leuven BE Leuven
- 代理机构: Knobbe Martens Olson & Bear LLP
- 主分类号: H01L21/441
- IPC分类号: H01L21/441
摘要:
The present disclosure is related to a method for forming a catalyst nanoparticle on a metal surface, the nanoparticle being suitable for growing a single nanostructure, in particular a carbon nanotube, the method comprising at least the steps of: providing a substrate, having a metal layer on at least a portion of the substrate surface, depositing a sacrificial layer at least on the metal layer, producing a small hole in the sacrificial layer, thereby exposing the metal layer, providing a single catalyst nanoparticle into the hole, removing the sacrificial layer. The disclosure is further related to growing a carbon nanotube from the catalyst nanoparticle.