公开(公告)号：US08338296B2

公开(公告)日：2012-12-25

申请号：US13096310

申请日：2011-04-28

申请人： Hari Pathangi Sriraman ,  Ann Witvrouw ,  Philippe M. Vereecken

发明人： Hari Pathangi Sriraman ,  Ann Witvrouw ,  Philippe M. Vereecken

IPC分类号： H01L21/441

CPC分类号： B01J23/74 ,  B01J23/755 ,  B01J35/0013 ,  B01J37/347 ,  B01J37/348 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  H01L29/0673

摘要： The present disclosure is related to a method for forming a catalyst nanoparticle on a metal surface, the nanoparticle being suitable for growing a single nanostructure, in particular a carbon nanotube, the method comprising at least the steps of: providing a substrate, having a metal layer on at least a portion of the substrate surface, depositing a sacrificial layer at least on the metal layer, producing a small hole in the sacrificial layer, thereby exposing the metal layer, providing a single catalyst nanoparticle into the hole, removing the sacrificial layer. The disclosure is further related to growing a carbon nanotube from the catalyst nanoparticle.

摘要翻译： 本公开涉及在金属表面上形成催化剂纳米颗粒的方法，所述纳米颗粒适于生长单个纳米结构，特别是碳纳米管，所述方法至少包括以下步骤：提供具有金属的基材 在衬底表面的至少一部分上层叠，至少在金属层上沉积牺牲层，在牺牲层中产生小孔，由此暴露金属层，向单孔提供单个催化剂纳米颗粒，去除牺牲层 。 本公开还涉及从催化剂纳米颗粒生长碳纳米管。

公开(公告)号：US20110315951A1

公开(公告)日：2011-12-29

申请号：US13096310

申请日：2011-04-28

申请人： Hari Pathangi Sriraman ,  Ann Witvrouw ,  Philippe M. Vereecken

发明人： Hari Pathangi Sriraman ,  Ann Witvrouw ,  Philippe M. Vereecken

IPC分类号： H01L29/66 ,  H01L21/20 ,  B05D5/12 ,  C25D15/00 ,  B82Y30/00 ,  B82Y40/00

CPC分类号： B01J23/74 ,  B01J23/755 ,  B01J35/0013 ,  B01J37/347 ,  B01J37/348 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  H01L29/0673

摘要： The present disclosure is related to a method for forming a catalyst nanoparticle on a metal surface, the nanoparticle being suitable for growing a single nanostructure, in particular a carbon nanotube, the method comprising at least the steps of: providing a substrate, having a metal layer on at least a portion of the substrate surface, depositing a sacrificial layer at least on the metal layer, producing a small hole in the sacrificial layer, thereby exposing the metal layer, providing a single catalyst nanoparticle into the hole, removing the sacrificial layer. The disclosure is further related to growing a carbon nanotube from the catalyst nanoparticle.

摘要翻译： 本公开涉及在金属表面上形成催化剂纳米颗粒的方法，所述纳米颗粒适于生长单个纳米结构，特别是碳纳米管，所述方法至少包括以下步骤：提供具有金属的基材 在衬底表面的至少一部分上层叠，至少在金属层上沉积牺牲层，在牺牲层中产生小孔，由此暴露金属层，向单孔提供单个催化剂纳米颗粒，去除牺牲层 。 本公开还涉及从催化剂纳米颗粒生长碳纳米管。