Invention Grant
- Patent Title: Ultraviolet reflector with coolant gas holes and method
- Patent Title (中): 具有冷却剂气孔的紫外线反射器及方法
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Application No.: US13164745Application Date: 2011-06-20
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Publication No.: US08338809B2Publication Date: 2012-12-25
- Inventor: Yao-Hung Yang , Tuan Anh Nguyen , Sanjeev Baluja , Andrzej Kaszuba , Juan Carlos Rocha , Thomas Nowak , Dustin W. Ho
- Applicant: Yao-Hung Yang , Tuan Anh Nguyen , Sanjeev Baluja , Andrzej Kaszuba , Juan Carlos Rocha , Thomas Nowak , Dustin W. Ho
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Janah & Associates, P.C.
- Agent Ashok K. Janah
- Main IPC: G01N21/33
- IPC: G01N21/33 ; B01J19/08 ; B29C35/08
Abstract:
A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a centrally positioned longitudinal strip and first and second side reflectors to form a parabolic-type surface. The longitudinal strip and first and second side reflectors have curved reflective surfaces with dichroic coatings and the longitudinal strip comprises a plurality of through holes to direct a coolant gas toward the ultraviolet lamp. A chamber that uses an ultraviolet lamp module with the reflector, and a method of ultraviolet treatment are also described.
Public/Granted literature
- US20110248183A1 ULTRAVIOLET REFLECTOR WITH COOLANT GAS HOLES AND METHOD Public/Granted day:2011-10-13
Information query
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